# microlithography

> English word · Noun

## Definitions
1. Any of several techniques for the production of microscale devices; especially the production of semiconductor devices using beams of photons or electrons.

## Etymology
From micro- + lithography.

## Source
Compiled from Wiktionary via kaikki.org (CC BY-SA). Data vintage: 2026-05-06.
Canonical page: https://plainspell.com/en/word/microlithography